
MEMS sensors by Murata Electronics realize high-precision detection through an original technology called 3D MEMS where silicon wafers are deeply etched with reactive ion etching. Use of 3D MEMS technology makes it possible to offer high reliability sensors with stable processes and reasonable cost.Their robust durability makes them suitable for their target markets with stringent operating conditions such as automobile, industrial and medical applications.
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SCA3100 Accelerometers
Digital 3-axis Accelerometers
Size 7.0 x 8.6 x 3.3 mm3 (w x l x h)
Advanced self-diagnostic features
Qualified according to AEC-Q100 standard
Package, pin-out and SPI protocol compatible with Murata digital accelerometer product family
RoHS compliant Dual Flat Lead (DFL) plastic package suitable for lead free soldering process and SMD mountingSCA3300 Accelerometers
3-axis Accelerometer with digital SPI interface
Size 7.6 x 8.6 x 3.3 mm3 (w x l x h)
3-axis high performance accelerometer with ±1.5 to ±6g user selectable measurement range
Extensive self-diagnostics features
Ground breaking bias stability, low noise level and good vibration robustness
SPI digital interface
Unique mechanical over damping
−40°C…+125°C operating range
3.0V…3.6V supply voltage with 1mA current consumption
Proven capacitive 3D-MEMS technologySCC1300 Combined Gyro Sensor and Accelerometer
Combined X-axis Gyroscope & 3-axis Accelerometer
Size 12.1 x 19.71 x 4.6 mm3 (w x l x h)
Angular rate measurement around X-axis
Acceleration measurement in X, Y and Z directions
Self diagnostics features
RoHS compliantSCC2000 Series Combined Gyro Sensor and Accelerometer
Combined X-axis or Z-axis Gyroscope & 3-axis Accelerometer
Single axis X or Z-axis gyroscope with ±125°/s or ±300°/s measurement range
3-axis accelerometer with ±2g or ±6g measurement range
Extensive self diagnostics features
SPI digital interface
User selectable low pass filter via SPI
−40°C…+125°C operating range
3.0V…3.6V supply voltage
Size 12.1 x 15.0 x 4.35 mm (w x l x h)
Product platform qualified according to AEC-Q100 standard and compliant to ISO26262 standard
Automotive qualified product versions are available on request
Also gyro only version available