MEMS sensors by Murata Electronics realize high-precision detection through an original technology called 3D MEMS where silicon wafers are deeply etched with reactive ion etching. Use of 3D MEMS technology makes it possible to offer high reliability sensors with stable processes and reasonable cost.Their robust durability makes them suitable for their target markets with stringent operating conditions such as automobile, industrial and medical applications.

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  • Solution
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    SCA3100 Accelerometers
    Digital 3-axis Accelerometers

    Size 7.0 x 8.6 x 3.3 mm3 (w x l x h)
    Advanced self-diagnostic features
    Qualified according to AEC-Q100 standard
    Package, pin-out and SPI protocol compatible with Murata digital accelerometer product family
    RoHS compliant Dual Flat Lead (DFL) plastic package suitable for lead free soldering process and SMD mounting

    SCA3300 Accelerometers
    3-axis Accelerometer with digital SPI interface

    Size 7.6 x 8.6 x 3.3 mm3 (w x l x h)
    3-axis high performance accelerometer with ±1.5 to ±6g user selectable measurement range
    Extensive self-diagnostics features
    Ground breaking bias stability, low noise level and good vibration robustness
    SPI digital interface
    Unique mechanical over damping
    −40°C…+125°C operating range
    3.0V…3.6V supply voltage with 1mA current consumption
    Proven capacitive 3D-MEMS technology

    SCC1300 Combined Gyro Sensor and Accelerometer
    Combined X-axis Gyroscope & 3-axis Accelerometer

    Size 12.1 x 19.71 x 4.6 mm3 (w x l x h)
    Angular rate measurement around X-axis
    Acceleration measurement in X, Y and Z directions
    Self diagnostics features
    RoHS compliant

    SCC2000 Series Combined Gyro Sensor and Accelerometer
    Combined X-axis or Z-axis Gyroscope & 3-axis Accelerometer

    Single axis X or Z-axis gyroscope with ±125°/s or ±300°/s measurement range
    3-axis accelerometer with ±2g or ±6g measurement range
    Extensive self diagnostics features
    SPI digital interface
    User selectable low pass filter via SPI
    −40°C…+125°C operating range
    3.0V…3.6V supply voltage
    Size 12.1 x 15.0 x 4.35 mm (w x l x h)
    Product platform qualified according to AEC-Q100 standard and compliant to ISO26262 standard
    Automotive qualified product versions are available on request
    Also gyro only version available

  • Solution

    ADAS Locator

    MEMS sensors provide reliable, automotive qualified components for inertial navigation in Autonomous vehicle. A 6 DOF (Degrees Of Freedom) Inertial Measurement Unit provides data of the vehicle movement independent of the climate conditions, other vehicles in traffic, velocity of the vehicle and generally works as “voice of reason” in conditions where other sensor systems are confused. Integration of the IMU to GNSS enables positioning in situations with reduced GNSS reception or lack of GNSS signal. IMU integration also enables improvement of GNSS accuracy from scale of meters to centimeters, what is needed for positioning within lane.


    Opens new possibilities in patient monitoring and elderly care in hospitals, assisted living and even at homes. Embedded heart and respiration rate and beat-to-beat time signal processing enabling patient monitoring from bed occupancy to sleep condition analysis.

    Structure health monitoring

    MEMS sensors offer reasonably priced opportunities to build systems for Structural Health Monitoring. Murata MEMS sensor portfolio has options from highest accuracy and stability to solutions with low power consumption but yet high enough accuracy to monitor minor changes in structural health. Murata sensors offer very low noise level to measure disturbing events and stability to detect smallest changes of displacement.


    Achieving positional adjustments is an ideal application for MEMS-based accelerometers and gyroscopes.Stability, noise and immunity to mechanical shock, all of which are vital for such precision agricultural applications involving moving heavy mach inery over undulating terrain. In this way the slope, direction of movement, and the change of the slope can be accurately measured. An accelerometer is used to measure the angle of inclination relative to the centre of the earth and a gyroscope is used to measure the speed that the angle changes.

    Weighting angle

    MEMS sensors offer reasonable priced opportunity to build system for both measuring the angle or build system for scale balancing. MEMS accelerometers and inclinometers can be used to get accurate angle reading and in a dynamic environment gyroscope can be used to achieve reliable measurement readings during movement. Murata MEMS sensors have options for the highest possible accuracy in most demanding application and robust sensing solutions to solve issues in moving machine environment. Murata sensors have excellent stability, resolution and linearity to measure smallest possible angles in all situations.