MEMS sensors by Murata Electronics realize high-precision detection through an original technology called 3D MEMS where silicon wafers are deeply etched with reactive ion etching. Use of 3D MEMS technology makes it possible to offer high reliability sensors with stable processes and reasonable cost.Their robust durability makes them suitable for their target markets with stringent operating conditions such as automobile, industrial and medical applications.

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    SCA3100 Accelerometers

    Digital 3-axis Accelerometers

    Size 7.0 x 8.6 x 3.3 mm3 (w x l x h)
    Advanced self-diagnostic features
    Qualified according to AEC-Q100 standard
    Package, pin-out and SPI protocol compatible with Murata digital accelerometer product family
    RoHS compliant Dual Flat Lead (DFL) plastic package suitable for lead free soldering process and SMD mounting

    SCA3300 Accelerometers

    3-axis Accelerometer with digital SPI interface

    Size 7.6 x 8.6 x 3.3 mm3 (w x l x h)

    3-axis high performance accelerometer with ±1.5 to ±6g user selectable measurement range

    Extensive self-diagnostics features

    Ground breaking bias stability, low noise level and good vibration robustness

    SPI digital interface

    Unique mechanical over damping

    −40°C…+125°C operating range

    3.0V…3.6V supply voltage with 1mA current consumption

    Proven capacitive 3D-MEMS technology

    SCC1300 Combined Gyro Sensor and Accelerometer

    Combined X-axis Gyroscope & 3-axis Accelerometer

    Size 12.1 x 19.71 x 4.6 mm3 (w x l x h)

    Angular rate measurement around X-axis

    Acceleration measurement in X, Y and Z directions

    Self diagnostics features

    RoHS compliant

    SCC2000 Series Combined Gyro Sensor and Accelerometer

    Combined X-axis or Z-axis Gyroscope & 3-axis Accelerometer

    Single axis X or Z-axis gyroscope with ±125°/s or ±300°/s measurement range

    3-axis accelerometer with ±2g or ±6g measurement range

    Extensive self diagnostics features

    SPI digital interface

    User selectable low pass filter via SPI

    −40°C…+125°C operating range

    3.0V…3.6V supply voltage

    Size 12.1 x 15.0 x 4.35 mm (w x l x h)

    Product platform qualified according to AEC-Q100 standard and compliant to ISO26262 standard

    Automotive qualified product versions are available on request

    Also gyro only version available